A variable probe pitch micro-Hall effect method

• Maria-Louise Witthøft,
• Frederik W. Østerberg,
• Janusz Bogdanowicz,
• Rong Lin,
• Henrik H. Henrichsen,
• Ole Hansen and
• Dirch H. Petersen

Beilstein J. Nanotechnol. 2018, 9, 2032–2039, doi:10.3762/bjnano.9.192

• mobility. Keywords: four-point probes; Hall effect; metrology; mobility; variable Probe Pitch; Introduction Materials characterization becomes increasingly difficult as the dimensions of transistors continue to decrease. Although three dimensional electrical characterization is the ultimate goal of

• the exact distance between the probe and the insulating boundary. To this end, different measurement strategies have been described using micro four-point probes [4][9][10][11]. Most recently, a strategy based on variable probe pitch measurements using a multi-point probe with different subsets of

• four electrodes has been developed [11][12]. Similar strategies using variable probe pitch multi-point probes have been used for other systems, including current-in-plane tunneling measurements [13], junction-leakage measurements [14] and surface-conductivity measurements of bulk materials [15][16]. In